@article{article, title = {{Defect photoluminescence from pulsed鈥恖aser鈥恆nnealed ion鈥恑mplanted Si}}, publisher = {{AIP Publishing}}, url = {{}}, year = {{1981}}, month = {{1}}, author = {{Skolnick MS and Cullis AG and Webber HC}}, doi = {{10.1063/1.92405}}, volume = {{38}}, journal = {{Applied Physics Letters}}, issue = {{6}}, pages = {{464-466}}, note = {{Accessed on 2025/08/18}}}