TY - JOUR T1 - The effect of ion-beam specimen preparation techniques on vacancy-type defects in silicon JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms PY - 2006/01/01 AU - Gandy AS AU - Donnelly SE AU - Beaufort M-F AU - Vishnyakov VM AU - Barbot J-F ED - DO - DOI: 10.1016/j.nimb.2005.08.097 PB - Elsevier BV VL - 242 IS - 1-2 SP - 610 EP - 613 Y2 - 2025/07/30 ER -