@article{article, title = {{The measurement and control of the ion energy distribution function at a surface in an RF plasma}}, publisher = {{IOP Publishing}}, url = {{http://dx.doi.org/10.1088/0957-0233/11/12/312 }}, year = {{2000}}, month = {{11}}, author = {{Barton D and Heason DJ and Short RD and Bradley JW}}, doi = {{10.1088/0957-0233/11/12/312}}, volume = {{11}}, journal = {{Measurement Science and Technology}}, issue = {{12}}, pages = {{1726-1731}}, note = {{Accessed on 2025/09/04}}}