@article{article, title = {{Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS}}, publisher = {{Cambridge University Press (CUP)}}, url = {{}}, year = {{2012}}, month = {{1}}, author = {{Guan W and Bhatta U and Ross IM and Ghatak J and Moebus G and Peng N}}, doi = {{10.1017/s1431927612003765}}, volume = {{18}}, journal = {{Microscopy and Microanalysis}}, issue = {{S2}}, pages = {{382-383}}, note = {{Accessed on 2025/07/28}}}