@inproceedings{inproceedings, title = {{Use of wafer backside inspection and SPR to address systemic tool and process issues}}, publisher = {{SPIE}}, url = {{}}, year = {{2010}}, month = {{12}}, author = {{Carlson A and Bachiraju P and Clark J and Trost D}}, doi = {{10.1117/12.846688}}, journal = {{Metrology, Inspection, and Process Control for Microlithography XXIV}}, note = {{Accessed on 2025/08/13}}}