TY - CONF T1 - A new Gaussian process-based approach for uncertainty propagation in surface metrology profile parameters estimation JO - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019 PY - 2019/01/01 AU - Obajemu O AU - Mahfouf M AU - McLeay TE AU - Jiang X AU - Scott PJ AU - Kadirkamanathan V ED - SN - 9780995775145 SP - 520 EP - 523 Y2 - 2025/08/23 ER -