@inproceedings{inproceedings, title = {{3D determination of a MOSFET gate morphology by FIB tomography}}, url = {{http://eprints.whiterose.ac.uk/148197/ }}, year = {{2003}}, month = {{1}}, author = {{Inkson BJ and Olsen S and Norris DJ and O'Neill AG and Mobus G}}, journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 2003}}, issue = {{180}}, pages = {{611-616}}, note = {{Accessed on 2025/08/12}}}